Characteristics of Highly Sensitive Hydrogen Sensor Based on Pt-WO<sub>3</sub>/Si Microring Resonator

Characteristics of Highly Sensitive Hydrogen Sensor Based on Pt-WO<sub>3</sub>/Si Microring Resonator

Hydrogen gas has attracted attention as a new energy carrier, and simple but highly sensitive hydrogen sensors are required. We fabricated an optical hydrogen sensor based on a silicon microring resonator (MRR) with tungsten oxide (WO<sub>3</sub>) using a complementary metal-oxide-semico...

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Bibliographic Details
Main Authors: Sosuke Matsuura, Naoki Yamasaku, Yoshiaki Nishijima, Shinji Okazaki, Taro Arakawa
Format: Article
Language:English
Published: MDPI AG 2019-12-01
Series:Sensors
Subjects:
hydrogen
wo<sub>3</sub>
microring resonator
gas sensor
gas detector
Online Access:https://www.mdpi.com/1424-8220/20/1/96

Internet

https://www.mdpi.com/1424-8220/20/1/96

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