A Monolithic Integration Bio-Inspired Three-Dimensional MEMS Vector Hydrophone
Three-dimensional vector hydrophone plays an important role in underwater spatial location. In order to solve the problems of monolithic integration and linearity of previous three-dimensional vector hydrophones, a three-dimensional micro-electro-mechanical system (MEMS) vector hydrophone based on t...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8746180/ |