Structural properties of a-Si films and their effect on aluminum induced crystallization
In this paper, we report the influence of the structural properties of amorphous silicon (a-Si) on its subsequent crystallization behavior via the aluminum induced crystallization (AIC) method. Two distinct a-Si deposition techniques, electron beam evaporation and plasma enhanced chemical vapor depo...
Main Authors: | , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2015-10-01
|
Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.4933193 |