Structural properties of a-Si films and their effect on aluminum induced crystallization

Structural properties of a-Si films and their effect on aluminum induced crystallization

In this paper, we report the influence of the structural properties of amorphous silicon (a-Si) on its subsequent crystallization behavior via the aluminum induced crystallization (AIC) method. Two distinct a-Si deposition techniques, electron beam evaporation and plasma enhanced chemical vapor depo...

Full description

Bibliographic Details
Main Authors: Aydin Tankut, Mehmet Karaman, Engin Ozkol, Sedat Canli, Rasit Turan
Format: Article
Language:English
Published: AIP Publishing LLC 2015-10-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4933193

Similar Items

Similar Items