Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns

Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns

Scanning MEMS (micro-electro-mechanical system) mirrors are attractive given their potential use in a diverse array of laser scanning display and imaging applications. Here we report on an electrostatic MEMS mirror for high definition and high frame rate (HDHF) Lissajous scanning. The MEMS mirror co...

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Bibliographic Details
Main Authors: Yeong-Hyeon Seo, Kyungmin Hwang, Hyunwoo Kim, Ki-Hun Jeong
Format: Article
Language:English
Published: MDPI AG 2019-01-01
Series:Micromachines
Subjects:
MEMS mirror
Lissajous scanning
pseudo-resonant
sensing
imaging
display
Online Access:http://www.mdpi.com/2072-666X/10/1/67

Internet

http://www.mdpi.com/2072-666X/10/1/67

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