Forced coupling vibration analysis of FBAR based on two-dimensional equations associated with state-vector approach
In our previous work, a system of two-dimensional equations for piezoelectric thin-film acoustic wave resonators (FBAR) has been derived and then successfully applied on the free vibration analysis of a finite FBAR plate. In this paper, we analyzed the forced vibrations of FBAR with alternating volt...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-09-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5046533 |