Massively parallel cantilever-free atomic force microscopy
Atomic force microscopy (AFM) provides high resolution, but is limited to small areas. Here, the authors introduce a massively parallel AFM approach with >1000 probes in a cantilever-free probe architecture, and present an optical method for detecting probe–sample contact with sub-10 nm vertical...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2021-01-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-020-20612-3 |