Experimental and Numerical Study on the Characteristics of the Thermal Design of a Large-Area Hot Plate for Nanoimprint Equipment
A numerical study was conducted on the thermal performance of a large-area hot plate specifically designed as a heating and cooling tool for thermal nanoimprint lithography processes. The hot plate had the dimensions 240 mm × 240 mm × 20 mm, in which a series of cartridge heaters a...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-09-01
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| Series: | Sustainability |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2071-1050/11/17/4795 |