Design of Refractive/Diffractive Hybrid Projection Lens for DMD-Based Maskless Lithography

Design of Refractive/Diffractive Hybrid Projection Lens for DMD-Based Maskless Lithography

The projection lens is the core component of DMD-based maskless lithography and its imaging quality directly affects the transferal of exposure pattern. Based on the traditional projection lens system, we have designed diffractive optical element (DOE) and aspheric surfaces to optimize the refractiv...

Full description

Bibliographic Details
Main Authors: Zhuohui Xu, Jinyun Zhou, Bo Wang, Ziming Meng
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Optics
Subjects:
projection lens
maskless lithography
diffractive optics
lens design
Online Access:https://www.mdpi.com/2673-3269/2/2/11

Internet

https://www.mdpi.com/2673-3269/2/2/11

Similar Items