Comparison of bulk FinFET and SOI FinFET

In this study, we compare the differences and advantages between Bulk FinFET and SOI FinFET. The results are simulated by using the ISE TCAD software. By changing the parameters of the gate voltage, drain voltage and gate length to analysis which characteristic is better. Through the experiment resu...

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Bibliographic Details
Main Authors: Chen Ying-Yu, Lin Yu-Hsien
Format: Article
Language:English
Published: EDP Sciences 2018-01-01
Series:MATEC Web of Conferences
Online Access:https://doi.org/10.1051/matecconf/201820102009