Metrological Array of Cyber-Physical Systems. Part 13. Segmental Approximation for Surface Topology Reconstruction

Metrological Array of Cyber-Physical Systems. Part 13. Segmental Approximation for Surface Topology Reconstruction

This article presents the segment approximation method for surface topology reconstruction from white light interferogram. The method involves polynomial approximation of separate interferogram segments, and polynomial coefficients are computed at calibration stage. Metrological properties of propos...

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Bibliographic Details
Main Authors: Svyatoslav YATSYSHYN, Bohdan STADNYK, Eberhard MANSKE, Anna KHOMA
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2015-12-01
Series:Sensors & Transducers
Subjects:
White-Light Interferometry
Topology Reconstruction
Mathematical Model
Approximation
Peak Detection
Optical Metrology.
Online Access:http://www.sensorsportal.com/HTML/DIGEST/december_2015/Vol_195/P_2776.pdf

Internet

http://www.sensorsportal.com/HTML/DIGEST/december_2015/Vol_195/P_2776.pdf

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