Double-Diffracted Spatially Separated Heterodyne Grating Interferometer and Analysis on its Alignment Tolerance

Double-Diffracted Spatially Separated Heterodyne Grating Interferometer and Analysis on its Alignment Tolerance

An optical configuration of double-diffracted spatially separated heterodyne grating interferometer with a mechanical fixture was designed. To further investigate its features and provide robust measurements, the alignment tolerance in double-diffracted spatially separated heterodyne grating interfe...

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Bibliographic Details
Main Authors: Di Chang, Xu Xing, Pengcheng Hu, Jianing Wang, Jiubin Tan
Format: Article
Language:English
Published: MDPI AG 2019-01-01
Series:Applied Sciences
Subjects:
grating interferometer
laser encoder
spatially separated heterodyne interferometry
alignment tolerance
Online Access:http://www.mdpi.com/2076-3417/9/2/263

Internet

http://www.mdpi.com/2076-3417/9/2/263

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