Novel pure‐metal tri‐axis CMOS‐MEMS accelerometer design and implementation
Abstract This work proposed a pure‐metal, single‐proof‐mass structure fabricated by the standard 0.18 μm one‐poly‐silicon six‐metal (1P6M) CMOS process along with one in‐house post‐CMOS wet‐etching approach. The implemented state‐of‐the‐art symmetrical tri‐axis accelerometer consists of the disk‐lik...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2021-10-01
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| Series: | Micro & Nano Letters |
| Online Access: | https://doi.org/10.1049/mna2.12014 |