Optimization of Processing Parameters for Water-Jet-Assisted Laser Etching of Polycrystalline Silicon

Optimization of Processing Parameters for Water-Jet-Assisted Laser Etching of Polycrystalline Silicon

Liquid-assisted laser technology is used to etch defect-free materials for high-precision electronics and machinery. This study investigates water-jet-assisted laser etching of polysilicon material. The depths and widths of the etched grooves were investigated for different water-jet incident angles...

Full description

Bibliographic Details
Main Authors:	Xuehui Chen, Xiang Li, Chao Wu, Yuping Ma, Yao Zhang, Lei Huang, Wei Liu
Format:	Article
Language:	English
Published:	MDPI AG 2019-05-01
Series:	Applied Sciences
Subjects:	laser etching water jet polycrystalline silicon orthogonal test
Online Access:	https://www.mdpi.com/2076-3417/9/9/1882

Similar Items

Design and Research of a Color Discrimination Method for Polycrystalline Silicon Cells Based on Laser Detection System
by: Zijian Chen, et al.
Published: (2019-10-01)

Crystallographically Determined Etching and Its Relevance to the Metal-Assisted Catalytic Etching (MACE) of Silicon Powders
by: Kurt W. Kolasinski, et al.
Published: (2019-01-01)

Self -Phase Modulation of Silicon Nanostructure Produced by Laser Induced Etching
by: Hadeel F. Shaker, et al.
Published: (2017-01-01)

Molecular Dynamics Simulation of Nanoscale Abrasive Wear of Polycrystalline Silicon
by: Pengzhe Zhu, et al.
Published: (2018-12-01)

Electrochemical etch characteristics of (100) silicon in tetramethyl ammonium hydroxide
by: Watts, Paul E.
Published: (2012)

Unraveling the Morphological Evolution and Etching Kinetics of Porous Silicon Nanowires During Metal-Assisted Chemical Etching
by: Lester U. Vinzons, et al.
Published: (2017-06-01)

Obtaining porous silicon suitable for sensor technology using MacEtch nonelectrolytic etching
by: Iatsunskyi I. R.
Published: (2013-12-01)

Influence of polycrystalline silicon layer on flow through «metal — p-Si» contact
by: Smyntyna V. A., et al.
Published: (2011-11-01)

Silicon Conical Structures by Metal Assisted Chemical Etching
by: Oscar Pérez-Díaz, et al.
Published: (2020-04-01)

Friction Performance of Aluminum-Silicon Alloy Cylinder Liner after Chemical Etching and Laser Finishing
by: Fengming Du, et al.
Published: (2019-04-01)

Modeling, design and demonstration of through-package-vias in panel-based polycrystalline silicon interposers for high performance, high reliability and low cost
by: Chen, Qiao
Published: (2015)

Anisotropic etching for silicon micromachining
by: Hobbs, Neil Townsend
Published: (2014)

Silicon Nanowires Synthesis by Metal-Assisted Chemical Etching: A Review
by: Antonio Alessio Leonardi, et al.
Published: (2021-02-01)

Effect of dislocation density on residual stress in polycrystalline silicon wafers
by: Garcia, Victoria
Published: (2008)

Polycrystalline Silicon ISFETs on Glass Substrate
by: Hiroshi Maeda, et al.
Published: (2005-05-01)

Large-Scale and Localized Laser Crystallization of Optically Thick Amorphous Silicon Films by Near-IR Femtosecond Pulses
by: Kirill Bronnikov, et al.
Published: (2020-11-01)

On the Formation of Black Silicon Features by Plasma-Less Etching of Silicon in Molecular Fluorine Gas
by: Bishal Kafle, et al.
Published: (2020-11-01)

Scaling Down Effect on Low Frequency Noise in Polycrystalline Silicon Thin-Film Transistors
by: Yuan Liu, et al.
Published: (2019-01-01)

Photonic jet for spatial resolution improvement in direct pulse near-IR laser micro-etching
by: Abdurrochman, Andri
Published: (2015)

Synthesis and Characterization of Chemically Etched Nanostructured Silicon
by: Mughal, Asad Jahangir
Published: (2012)

Femtosecond Laser Assisted 3D Etching Using Inorganic-Organic Etchant
by: Bachmann, J., et al.
Published: (2022)

Influence of spectral beam splitting on the performance of polycrystalline silicon PV cells
by: Agutu, Churchill Omondi
Published: (2018)

Anti-Wear Property of Aluminum–Silicon Alloy Treated by Chemical Etching, Mechanical Honing and Laser Finishing
by: Fengming Du, et al.
Published: (2019-04-01)

Electrically active defects associated with dislocations and grain boundaries in silicon
by: Ayres, J. R. A.
Published: (1995)

Phosphorous diffusion and hydrogen passivation of polycrystalline silicon for photovoltaic cells.
Published: (2012)

Modelling localized charge-injection region of the p-channel low-temperature polycrystalline silicon thin-film transistor
by: KwangHyun Choi, et al.
Published: (2018-01-01)

Fabrication and Optical Characterization of Silicon Nanostructure Arrays by Laser Interference Lithography and Metal-Assisted Chemical Etching
by: P. Heydari, et al.
Published: (2014-10-01)

Two-Photon 3-Dimensional Photoelectrochemical Etching of Single Crystal Silicon Carbide
by: Nyholm, Peter Robert
Published: (2020)

Electron microscopy study of nickel disilicide, cobalt disilicide and (magnesium(x) iron(1-x)) silicon trioxide (0 less than x less than 0.12) precipitates in polycrystalline silicon
by: Chung, Juyong
Published: (1995)

Metal-Assisted Catalytic Etching (MACE) for Nanofabrication of Semiconductor Powders
by: Kurt W. Kolasinski
Published: (2021-06-01)

Micromanufacturing in Fused Silica via Femtosecond Laser Irradiation Followed by Gas-Phase Chemical Etching
by: Walter Navarrini, et al.
Published: (2012-09-01)

Investigation on the effect of delay time during pulse chemical etching of porous silicon formation
by: Mahmood, A., et al.
Published: (2019)

A new technique for optimizing orientation dependent etching of silicon: Process and method
by: Mazdiyasni, Parviz, 1960-
Published: (1987)

Synthesis of carboxylated silicon phthalocyanine photosensitive microspheres with controllable etching
by: Dan-Dan Liu, et al.
Published: (2019-01-01)

Superhydrophobic silicon fabricated by phosphomolybdic acid-assisted electrochemical etching
by: Yanbiao Zhou, et al.

Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification
by: Huang Ji, et al.
Published: (2019-05-01)

Nanosecond-Fiber Laser Cutting and Finishing Process for Manufacturing Polycrystalline Diamond-Cutting Tool Blanks
by: Fuh-Yu Chang, et al.
Published: (2021-06-01)

A Graphene/Polycrystalline Silicon Photodiode and Its Integration in a Photodiode–Oxide–Semiconductor Field Effect Transistor
by: Yu-Yang Tsai, et al.
Published: (2020-06-01)

Smooth or not: Robust fused silica micro-components by femtosecond-laser-assisted etching
by: Remo N. Widmer, et al.
Published: (2021-06-01)

Some Investigations on the Anisotropy of the Chemical Etching of (hk0) and (hhl) Silicon Plates in a NaOH 35% Solution. Part I: 2D Etching Shapes
by: C. A. Hodebourg, et al.
Published: (2001-01-01)