A Theoretical and Simulation Analysis of the Sensitivity of SiNWs-FET Sensors

Theoretical study and software simulation on the sensitivity of silicon nanowires (SiNWs) field effect transistor (FET) sensors in terms of surface-to-volume ratio, depletion ratio, surface state and lattice quality are carried out. Generally, SiNWs-FET sensors with triangular cross-sections are mor...

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Bibliographic Details
Main Authors: Yi Yang, Zicheng Lu, Duo Liu, Yuelin Wang, Shixing Chen, Tie Li
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Biosensors
Subjects:
Online Access:https://www.mdpi.com/2079-6374/11/4/121