Interactive Manipulation of Nonconductive Microparticles in Scanning Electron Microscope by a Virtual Nano-Hand Strategy

Micro/nano-manipulation is the fabrication of particular constructs on devices at the micro/nano-scale. Precise manipulation of microparticles is one of the key technological difficulties in manufacturing micro/nano-scale components. Based on scanning electron microscopy and nanomanipulator, this pa...

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Bibliographic Details
Main Authors: Mei Liu, Kai Cheng, Xiangzheng Qin, Zhenzhong Wei, Brandon Borom, Weilin Su, Jinbo Chen, Yunpeng Feng, Tao Wang, Jinjun Rao
Format: Article
Language:English
Published: MDPI AG 2019-10-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/10/10/670