Atomic layer deposited V2O5 coatings: a promising cathode for Li-ion batteries
A modified, thermal atomic layer deposition process was employed for the pulsed chemical vapor deposition growth of vanadium pentoxide films using tetrakis (dimethylamino) vanadium and water as a co-reagent.Depositions were carried out at 350oC for 400 pulsed CVD cycles, and samples were subsequent...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
International Association of Physical Chemists (IAPC)
2019-12-01
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Series: | Journal of Electrochemical Science and Engineering |
Subjects: | |
Online Access: | http://pub.iapchem.org/ojs/index.php/JESE/article/view/708 |