Analytical, Numerical and Experimental Study of a Horizontal Electrothermal MEMS Microgripper for the Deformability Characterisation of Human Red Blood Cells
Microgrippers are typical microelectromechanical systems (MEMS) that are widely used for micromanipulation and microassembly in both biological and micromanufacturing fields. This paper presents the design, modelling, fabrication and experimental testing of an electrothermal microgripper based on a...
Main Authors: | , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2018-03-01
|
Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/9/3/108 |