Investigation of the dynamic properties of on-chip coupled piezo/photodiodes by time-resolved atomic force and Kelvin probe microscopy
We have studied the dynamic properties of hybrid devices in which the piezoelectric material lead zirconate titanate is integrated with silicon photodiodes on-chip. Such an integrated system enables direct conversion of light energy into mechanical deformation and motion, opening up new pathways for...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-10-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0028481 |