Short-Term Scheduling Model of Cluster Tool in Wafer Fabrication
Since last decade, the cluster tool has been mainstream in modern semiconductor manufacturing factories. In general, the cluster tool occupies 60% to 70% of production machines for advanced technology factories. The most characteristic feature of this kind of equipment is to integrate the relevant p...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-05-01
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| Series: | Mathematics |
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| Online Access: | https://www.mdpi.com/2227-7390/9/9/1029 |