Atmospheric pressure plasma polymerization using double grounded electrodes with He/Ar mixture
In this study, we have proposed the double grounded atmospheric pressure plasma jet (2G-APPJ) device to individually control the plasmas in both fragmentation (or active) and recombination (or passive) regions with a mixture of He and Ar gases to deposit organic thin films on glass or Si substrates....
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2015-09-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4931036 |