Integrated nano-optomechanical displacement sensor with ultrawide optical bandwidth

On-chip mechanical sensing platforms require tuneable lasers with narrow linewidth and low spectral noise, making read-out challenging. Here, the authors report a nanomechanical sensor with 80nm bandwidth, displacement imprecision of 45 fm/Hz1/2 as well as a dynamic range greater than 30 nm with int...

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Bibliographic Details
Main Authors: Tianran Liu, Francesco Pagliano, René van Veldhoven, Vadim Pogoretskiy, Yuqing Jiao, Andrea Fiore
Format: Article
Language:English
Published: Nature Publishing Group 2020-05-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-020-16269-7