The Effect of Thermal Annealing Processes on Structural and Photoluminescence of Zinc Oxide Thin Film

This study used radio frequency sputtering at room temperature to prepare a zinc oxide (ZnO) thin film. After deposition, the thin film was placed in a high-temperature furnace to undergo thermal annealing at different temperatures (300, 400, 500, and 600°C) and for different dwelling times (15, 30,...

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Bibliographic Details
Main Authors: Huai-Shan Chin, Long-Sun Chao
Format: Article
Language:English
Published: Hindawi Limited 2013-01-01
Series:Journal of Nanomaterials
Online Access:http://dx.doi.org/10.1155/2013/424953