Design and performance evaluation of thin-film actuators based on flexible Ni-Co substrates
Abstract This paper proposes a new design of bimorph-type electrothermal actuators based on flexible Ni-Co substrates and describes the results of the finite element method (FEM) simulation and performance evaluation of the actuators. In the design of the actuators, a multilayer structure consisting...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
SpringerOpen
2020-11-01
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| Series: | Micro and Nano Systems Letters |
| Subjects: | |
| Online Access: | http://link.springer.com/article/10.1186/s40486-020-00122-z |