Capillary Microvalve Actuation Using Thermal Expansion of Trapped Air Bubble
In this study, we demonstrate a compact actuation mechanism of a silicon capillary stop microvalve, based on electrothermal expansion of a trapped air bubble in a chamber. The bubble is heated using an integrated aluminum microheater deposited on the silicon substrate above the air chamber. The heat...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-11-01
|
| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/1031 |