Theoretical and experimental revision of surface acoustic waves on the (100) plane of silicon
Abstract The phase velocity dispersion of the surface acoustic waves on a basal plane of Si(100) has been calculated in the whole range of the azimuthal angle of propagation. We present a detailed description of the calculations. These calculations are compared with the experimental data obtained by...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2021-02-01
|
| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-021-82211-6 |