Theoretical and experimental revision of surface acoustic waves on the (100) plane of silicon

Abstract The phase velocity dispersion of the surface acoustic waves on a basal plane of Si(100) has been calculated in the whole range of the azimuthal angle of propagation. We present a detailed description of the calculations. These calculations are compared with the experimental data obtained by...

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Main Authors: Alexander Tarasenko, Radim Čtvrtlík, Radim Kudělka
Format: Article
Language:English
Published: Nature Publishing Group 2021-02-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-021-82211-6
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spelling doaj-c1c0d542bf6b4807ad551b84da1a0d142021-02-07T12:36:10ZengNature Publishing GroupScientific Reports2045-23222021-02-011111810.1038/s41598-021-82211-6Theoretical and experimental revision of surface acoustic waves on the (100) plane of siliconAlexander Tarasenko0Radim Čtvrtlík1Radim Kudělka2FZU-Institute of Physics of the Czech Academy of SciencesRegional Centre of Advanced Technologies and Materials, Joint Laboratory of Optics of Palacky University, Institute of Physics of Academy of Sciences of the Czech Republic, Faculty of Science, Palacky UniversityRegional Centre of Advanced Technologies and Materials, Joint Laboratory of Optics of Palacky University, Institute of Physics of Academy of Sciences of the Czech Republic, Faculty of Science, Palacky UniversityAbstract The phase velocity dispersion of the surface acoustic waves on a basal plane of Si(100) has been calculated in the whole range of the azimuthal angle of propagation. We present a detailed description of the calculations. These calculations are compared with the experimental data obtained by a laser acoustic method. Our data convincingly demonstrate the existence of a gap in the spectrum of the phase velocities. The gap means that in a definite range of the phase velocities the SAWs are absent in the whole interval of the azimuthal angles. There is an excellent coincidence between the numerical and experimental data.https://doi.org/10.1038/s41598-021-82211-6
collection DOAJ
language English
format Article
sources DOAJ
author Alexander Tarasenko
Radim Čtvrtlík
Radim Kudělka
spellingShingle Alexander Tarasenko
Radim Čtvrtlík
Radim Kudělka
Theoretical and experimental revision of surface acoustic waves on the (100) plane of silicon
Scientific Reports
author_facet Alexander Tarasenko
Radim Čtvrtlík
Radim Kudělka
author_sort Alexander Tarasenko
title Theoretical and experimental revision of surface acoustic waves on the (100) plane of silicon
title_short Theoretical and experimental revision of surface acoustic waves on the (100) plane of silicon
title_full Theoretical and experimental revision of surface acoustic waves on the (100) plane of silicon
title_fullStr Theoretical and experimental revision of surface acoustic waves on the (100) plane of silicon
title_full_unstemmed Theoretical and experimental revision of surface acoustic waves on the (100) plane of silicon
title_sort theoretical and experimental revision of surface acoustic waves on the (100) plane of silicon
publisher Nature Publishing Group
series Scientific Reports
issn 2045-2322
publishDate 2021-02-01
description Abstract The phase velocity dispersion of the surface acoustic waves on a basal plane of Si(100) has been calculated in the whole range of the azimuthal angle of propagation. We present a detailed description of the calculations. These calculations are compared with the experimental data obtained by a laser acoustic method. Our data convincingly demonstrate the existence of a gap in the spectrum of the phase velocities. The gap means that in a definite range of the phase velocities the SAWs are absent in the whole interval of the azimuthal angles. There is an excellent coincidence between the numerical and experimental data.
url https://doi.org/10.1038/s41598-021-82211-6
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