Morphology Evolution Of ZnO Thin Films Deposited By Nitrogen Mediated Crystallization Method

We study the surface morphology of ZnO thin films deposited by nitrogen mediated crystallization method utilizing atomic force microscopy as a function of nitrogen flow rates. Initially, the surface morphology of ZnO thin film deposited without nitrogen exhibits a bumpy surface with spiky grains whe...

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Bibliographic Details
Main Authors: Suhariadi Iping, Shiratani Masaharu, Itagaki Naho
Format: Article
Language:English
Published: EDP Sciences 2018-01-01
Series:MATEC Web of Conferences
Online Access:https://doi.org/10.1051/matecconf/201815902031