Voltage-Tunable UVC–UVB Dual-Band Metal–Semiconductor–Metal Photodetector Based on Ga<sub>2</sub>O<sub>3</sub>/MgZnO Heterostructure by RF Sputtering

Voltage-Tunable UVC–UVB Dual-Band Metal–Semiconductor–Metal Photodetector Based on Ga<sub>2</sub>O<sub>3</sub>/MgZnO Heterostructure by RF Sputtering

Dual-band metal–semiconductor–metal (MSM) photodetectors (PDs) with a Ga<sub>2</sub>O<sub>3</sub>/MgZnO heterostructure were fabricated by radio frequency (RF) sputtering, which can detect ultraviolet C (UVC) and ultraviolet B (UVB) bands individually by controlling different...

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Bibliographic Details
Main Authors: Jie-Si Jheng, Chun-Kai Wang, Yu-Zung Chiou, Sheng-Po Chang, Shoou-Jinn Chang
Format: Article
Language:English
Published: MDPI AG 2020-10-01
Series:Coatings
Subjects:
Ga<sub>2</sub>O<sub>3</sub>
MgZnO
dual-band PD
UVB
UVC
voltage-tunable
Online Access:https://www.mdpi.com/2079-6412/10/10/994

Internet

https://www.mdpi.com/2079-6412/10/10/994

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