A Miniature Piezoresistive Transducer and a New Temperature Compensation Method for New Developed SEM-Based Nanoindentation Instrument Integrated With AFM Function

A Miniature Piezoresistive Transducer and a New Temperature Compensation Method for New Developed SEM-Based Nanoindentation Instrument Integrated With AFM Function

Instrumented indentation test inside SEM has become a versatile method for nanomechanical characterization and studying of deformation and failure mechanisms of coating materials at nano-to micro-scale thickness. However, the existing SEM-based nanoindentation instrument cannot acquire surface rough...

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Bibliographic Details
Main Authors: Sen Gu, Junhui Zhu, Peng Pan, Yong Wang, Changhai Ru
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Access
Subjects:
SEM-based instrument indentation test
piezoresistive transducer
temperature compensation
SEM
AFM
Online Access:https://ieeexplore.ieee.org/document/9106373/

Internet

https://ieeexplore.ieee.org/document/9106373/

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