A Miniature Piezoresistive Transducer and a New Temperature Compensation Method for New Developed SEM-Based Nanoindentation Instrument Integrated With AFM Function
Instrumented indentation test inside SEM has become a versatile method for nanomechanical characterization and studying of deformation and failure mechanisms of coating materials at nano-to micro-scale thickness. However, the existing SEM-based nanoindentation instrument cannot acquire surface rough...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2020-01-01
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Series: | IEEE Access |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9106373/ |