3-Bit Digital-to-Analog Converter with Mechanical Amplifier for Binary Encoded Large Displacements
We present the design, fabrication, and characterization of a MEMS-based 3-bit Digital-to-Analog Converter (DAC) that allows the generation of large displacements. The DAC consists of electrostatic bending-plate actuators that are connected to a mechanical amplifier (mechAMP), enabling the amplifica...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-08-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/10/8/182 |