Influence of Geometric Properties of Capacitive Sensors on Slope Error and Nonlinearity of Displacement Measurements
Capacitive sensors are widely used in industrial applications, such as CNC machine tools, where reliable positioning in the micrometer range with nanometer accuracy is required. Hence, these sensors are operated in harsh industrial environments. The accuracy of these sensors is mainly limited by slo...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-06-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/13/4270 |