Microstructure and Properties of CrAlSiN Coatings Deposited by HiPIMS and Direct-Current Magnetron Sputtering
Four CrAlSiN coatings with different Al contents were prepared by varying Al sputtering power using a combined method of high power impulse magnetron sputtering (HiPIMS) and direct current magnetron sputtering (DCMS). Microstructure, chemical compositions and mechanical properties of the four coatin...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-08-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/9/8/512 |