A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Abstract In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventi...

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Bibliographic Details
Main Authors: Ribu Mathew, A. Ravi Sankar
Format: Article
Language:English
Published: SpringerOpen 2018-02-01
Series:Nano-Micro Letters
Subjects:
SU-8 polymer
Surface stress
Biological sensor
Cantilever
Chemical sensor
Piezoresistor
Online Access:http://link.springer.com/article/10.1007/s40820-018-0189-1

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http://link.springer.com/article/10.1007/s40820-018-0189-1

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