A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors
Abstract In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventi...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
SpringerOpen
2018-02-01
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Series: | Nano-Micro Letters |
Subjects: | |
Online Access: | http://link.springer.com/article/10.1007/s40820-018-0189-1 |