Fabrication of a CMOS-based Imaging Chip with Monolithically Integrated RGB and NIR Filters
Recent developments in multispectral cameras have demonstrated how compact and low-cost spectral sensors can be made by monolithically integrating filters on top of commercially available image sensors. In this paper, the fabrication of a RGB + NIR variation to such a single-chip imaging system is d...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-01-01
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Series: | Proceedings |
Subjects: | |
Online Access: | http://www.mdpi.com/2504-3900/2/13/751 |