New Type Small-angle Sensor Based on the TIR and SPR Theories in Heterodyne Interferomery

In this paper, a new type small-angle sensor based on the total internal reflection (TIR) and surface plasmon resonance (SPR) theories in heterodyne interferomery is proposed. With the small-displacement sensor, a small rotation angle can be obtained only by measuring the variation in phase differen...

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Bibliographic Details
Main Authors: Shinn-Fwu Wang, Jyh-Shyan Chiu, Lung-Hsiang Lee, Cheng-Min Lee, Rong-Moo Hong
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2009-06-01
Series:Sensors & Transducers
Subjects:
Online Access:http://www.sensorsportal.com/HTML/DIGEST/june_09/P_439.pdf