Evaporation behavior of a thinning liquid film in a spin coating setup: Comparison between calculation and experiment

Abstract We present and analyze comprehensive measurements of the evaporation behavior, E, of a thinning liquid film during a hydrodynamic‐evaporative spin coating experiment. E, ω (the rotation speed), and ν (the liquid viscosity) are the main control parameters of the process. The entire film thin...

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Bibliographic Details
Main Authors: José Danglad‐Flores, Stephan Eickelmann, Hans Riegler
Format: Article
Language:English
Published: Wiley 2021-09-01
Series:Engineering Reports
Subjects:
Online Access:https://doi.org/10.1002/eng2.12390