Ultrathin MEMS thermoelectric generator with Bi2Te3/(Pt, Au) multilayers and Sb2Te3 legs

Ultrathin MEMS thermoelectric generator with Bi2Te3/(Pt, Au) multilayers and Sb2Te3 legs

Abstract Multilayer structure is one of the research focuses of thermoelectric (TE) material in recent years. In this work, n-type 800 nm Bi2Te3/(Pt, Au) multilayers are designed with p-type Sb2Te3 legs to fabricate ultrathin microelectromechanical systems (MEMS) TE devices. The power factor of the...

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Bibliographic Details
Main Authors: Yang Liu, Erzhen Mu, Zhenhua Wu, Zhanxun Che, Fangyuan Sun, Xuecheng Fu, Fengdan Wang, Xinwei Wang, Zhiyu Hu
Format: Article
Language:English
Published: SpringerOpen 2020-03-01
Series:Nano Convergence
Subjects:
MEMS
Multilayers
TE devices
Bi2Te3
Online Access:http://link.springer.com/article/10.1186/s40580-020-0218-x

Internet

http://link.springer.com/article/10.1186/s40580-020-0218-x

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