Glass Imprint Templates by Spark Assisted Chemical Engraving for Microfabrication by Hot Embossing
As the field of microelectromechanical systems (MEMS) matures, new demands are being placed on the microfabrication of complex architectures in robust materials, such as hard plastics. Iterative design optimization in a timely manner—rapid prototyping—places challenges on template fabrication, for m...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-01-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/8/1/29 |