Electroplated Nickel Micromirror Array
This paper presents the design, fabrication and testing of metallic micromirror array for use in Metal-Organic Molecular Beam Epitaxy system (MOMBE) to define the device structure and hence eliminate the need for etching and lithography. The micromirror is structurally composed of primarily electrop...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2010-04-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/april_2010/P_602.pdf |