Interferometric backward third harmonic generation microscopy for axial imaging with accuracy beyond the diffraction limit.

Interferometric backward third harmonic generation microscopy for axial imaging with accuracy beyond the diffraction limit.

A new nonlinear microscopy technique based on interference of backward-reflected third harmonic generation (I-THG) from multiple interfaces is presented. The technique is used to measure height variations or changes of a layer thickness with an accuracy of up to 5 nm. Height variations of a patterne...

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Bibliographic Details
Main Authors: Daaf Sandkuijl, Lukas Kontenis, Nuno M Coelho, Christopher McCulloch, Virginijus Barzda
Format: Article
Language:English
Published: Public Library of Science (PLoS) 2014-01-01
Series:PLoS ONE
Online Access:http://europepmc.org/articles/PMC3978065?pdf=render

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http://europepmc.org/articles/PMC3978065?pdf=render

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