Effects of Imprinting Pressure on the Damage of Flexible Composite Mould and Pattern Quality during UV Nanoimprinting
Imprinting pressure is the significant factor for composite mould durability and pattern quality during UV nanoimprinting on complex surfaces. To solve these problems, the effects of imprinting pressure on the damage of flexible composite mould and pattern quality-encountering particles were investi...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-10-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/10/10/706 |