In-Situ Heat Treatment Study on the Nanocrystalline Cr2O3 Film Using an Environmental Scanning Electron Microscope
In this work, the surface morphology changes of nanocrystalline Cr2O3 film deposited on Si wafer during the heating process were observed in-situ by means of an environmental scanning electron microscope (ESEM). The Cr2O3 film cracked at high temperature due to the cause of thermal stress; the corre...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-12-01
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| Series: | Coatings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-6412/7/12/225 |