Impact base excitation method with stacked PZT actuator for MEMS dynamic characterization
An impact base excitation method with stacked PZT actuator for MEMS dynamic characterization was studied. A typical impact base excitation device mainly includes a stacked PZT actuator, a base structure and an impulse power source. The principle of this method is as follows. The tested microstructur...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
JVE International
2016-03-01
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| Series: | Journal of Measurements in Engineering |
| Subjects: | |
| Online Access: | https://www.jvejournals.com/article/16605 |