A New Z-axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness
Presented in the paper is the design, the simulation, the fabrication and the experiment of a new z-axis resonant accelerometer based on the electrostatic stiffness. The new z-axis resonant micro-accelerometer, which consists of a torsional accelerometer and two plane resonators, decouples the sensi...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2015-01-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/15/1/687 |