Integration of Carbon Nanotubes in Microsystems: Local Growth and Electrical Properties of Contacts

Integration of Carbon Nanotubes in Microsystems: Local Growth and Electrical Properties of Contacts

Carbon nanotubes (CNTs) have been directly grown onto a silicon microsystem by a local synthesis method. This method has potential for wafer-level complimentary metal-oxide-semiconductor (CMOS) transistor-compatible integration of CNTs into more complex Si microsystems; enabling, e.g., gas sensors a...

Full description

Bibliographic Details
Main Authors: Knut E. Aasmundtveit, Einar Halvorsen, Bao Q. Ta, Tormod B. Haugen, Nils Hoivik
Format: Article
Language:English
Published: MDPI AG 2013-07-01
Series:Materials
Subjects:
carbon nanotubes
local synthesis
microheater
contacts
Schottky barrier
Online Access:http://www.mdpi.com/1996-1944/6/8/3094

Internet

http://www.mdpi.com/1996-1944/6/8/3094

Similar Items