High Frequency InGaAs MOSFET with Nitride Sidewall Design for Low Power Application

InxGa1-xAs devices have been widely researched for low power high frequency applications due to the outstanding electron mobility and small bandgap of the materials. Regrown source/drain technology is highly appreciated in InGaAs MOSFET, since it is able to reduce the thermal budget induced by ion i...

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Bibliographic Details
Main Authors: Jiongjiong Mo, Hua Chen, Zhiyu Wang, Faxin Yu
Format: Article
Language:English
Published: Hindawi Limited 2017-01-01
Series:Journal of Sensors
Online Access:http://dx.doi.org/10.1155/2017/4078240