Study and Evaluation of a PCB-MEMS Liquid Microflow Sensor
This paper presents the evaluation of a miniature liquid microflow sensor, directly integrated on a PCB. The sensor operation is based on the convective heat transfer principle. The heating and sensing elements are thin Pt resistors which are in direct electrical contact with the external copper tra...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2010-10-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/10/10/8981/ |