Fabrication of soft-magnetic FeAlSi thin films with nm-order thickness for the free layer of magnetic tunnel junction based sensors
FeAlSi epitaxial films were fabricated on single crystalline MgO(100) substrates and their structural and magnetic properties were investigated to apply them to the free layer in magnetic tunnel junction (MTJ) based sensors. We found that the film composition must be precisely controlled, and the po...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-01-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5129953 |