Calibration study for quadrupole mass spectrometer with LIP new UHV partial pressure standard

Calibration study for quadrupole mass spectrometer with LIP new UHV partial pressure standard

This study performed the calibration of QMG700 quadrupole mass spectrometer (QMS) against the ultrahigh vacuum (UHV) partial pressure standard. The research object was the sensitivity, noise level and minimum detectable partial pressure (MDPP) in the secondary electron multiplier (SEM) detector mode...

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Bibliographic Details
Main Authors: Dong Meng, Sun Wenjun, Wu Chengyao, Feng Tianyou, Zhang Suzhao, Cheng Yongjun
Format: Article
Language:English
Published: Elsevier 2021-12-01
Series:Measurement: Sensors
Subjects:
Quadrupole mass spectrometer
Partial pressure
Secondary electron multiplier detector
Sensitivity
Minimum detectable partial pressure
Online Access:http://www.sciencedirect.com/science/article/pii/S2665917421001318

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http://www.sciencedirect.com/science/article/pii/S2665917421001318

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